Open AccessGallium nitride thin films by microwave plasma-assisted ALD
Author(s) -
F. Romo-García,
H. J. Higuera-Valenzuela,
D. Cabrera-Germán,
D. Berman-Mendoza,
A. Ramos-Carrazco,
O. Contreras,
Rafael García-Gutiérrez
Publication year - 2019
Publication title -
optical materials express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.004187
Subject(s) - materials science , gallium , gallium nitride , plasma , optoelectronics , thin film , microwave , nitride , nanotechnology , physics , layer (electronics) , metallurgy , quantum mechanics