Open AccessUHV-CVD growth of high quality GeSn using SnCl4: from material growth development to prototype devices
Author(s) -
Perry C. Grant,
Wei Dou,
Bader Alharthi,
Joshua M. Grant,
Ha Nguyen Tran,
Grey Abernathy,
Aboozar Mosleh,
Wei Du,
Baohua Li,
Mansour Mortazavi,
Hameed A. Naseem,
Shui-Qing Yu
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.003277
Subject(s) - materials science , chemical vapor deposition , optoelectronics , quality (philosophy) , nanotechnology , physics , quantum mechanics