Open AccessInvestigation on the p-type formation mechanism of nitrogen ion implanted ZnO thin films induced by rapid thermal annealing
Author(s) -
Zheng Huang,
Haibo Ruan,
Hong Zhang,
Dan Shi,
Wanjun Li,
Guoping Qin,
Fang Wu,
Liang Fang,
Chunyang Kong
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.003098
Subject(s) - materials science , annealing (glass) , thin film , ion , ion implantation , nitrogen , thermal , rapid thermal processing , chemical engineering , optoelectronics , nanotechnology , composite material , silicon , chemistry , physics , organic chemistry , engineering , meteorology