Open AccessTen years of two-color photolithography [Invited]
Author(s) -
Νικόλαος Λιάρος,
John T. Fourkas
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.003006
Subject(s) - photolithography , materials science , optics , optical materials , optoelectronics , physics