Open AccessWater-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses
Author(s) -
Yuanxin Tan,
Wei Chu,
Peng Wang,
Wenbo Li,
Zhe Wang,
Ya Cheng
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.001971
Subject(s) - materials science , femtosecond , laser , optics , laser drilling , optoelectronics , physics