Open AccessModelling of removal characteristics and surface morphology formation in capacitively coupled atmospheric pressure plasma processing of fused silica optics
Author(s) -
Duo Li,
Na Li,
Xing Su,
Kan Liu,
Peng Ji,
Bo Wang
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.001893
Subject(s) - plasma , materials science , plasma processing , atmospheric pressure plasma , figuring , capacitively coupled plasma , atmospheric pressure , optics , atomic physics , electron , particle (ecology) , electron density , analytical chemistry (journal) , molecular physics , inductively coupled plasma , chemistry , physics , quantum mechanics , oceanography , chromatography , meteorology , geology