Open AccessModelling of removal characteristics and surface morphology formation in capacitively coupled atmospheric pressure plasma processing of fused silica optics
Author(s) -
Duo Li,
Na Li,
Xing Su,
Kan Liu,
Peng Ji,
Bo Wang
Publication year - 2019
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.001893
Subject(s) - materials science , plasma , figuring , plasma processing , atmospheric pressure plasma , atmospheric pressure , capacitively coupled plasma , particle (ecology) , optics , atomic physics , electron , analytical chemistry (journal) , molecular physics , inductively coupled plasma , chemistry , physics , oceanography , chromatography , quantum mechanics , meteorology , geology
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