Open AccessSilicon-rich silicon nitride thin films for subwavelength grating metalens
Author(s) -
Mao Ye,
Yueheng Peng,
Ya Yi
Publication year - 2019
Publication title -
optical materials express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.001200
Subject(s) - materials science , refractive index , fabrication , silicon nitride , grating , optoelectronics , chemical vapor deposition , atomic layer deposition , silicon , thin film , metalorganic vapour phase epitaxy , deposition (geology) , optics , nanotechnology , layer (electronics) , epitaxy , physics , medicine , paleontology , alternative medicine , pathology , sediment , biology
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