Open AccessSilicon-rich silicon nitride thin films for subwavelength grating metalens
Author(s) -
Mao Ye,
Yueheng Peng,
Ya Sha Yi
Publication year - 2019
Publication title -
optical materials express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.9.001200
Subject(s) - materials science , silicon nitride , silicon , optoelectronics , thin film , grating , optics , nanotechnology , physics