Silicon grating coupler on a lithium niobate thin film waveguide
Author(s) -
Zhihua Chen,
Yiwen Wang,
Honghu Zhang,
Hui Hu
Publication year - 2018
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.8.001253
Subject(s) - materials science , lithium niobate , grating , optics , photolithography , waveguide , optoelectronics , thin film , silicon , sputter deposition , output coupler , etching (microfabrication) , sputtering , resonator , layer (electronics) , physics , nanotechnology , composite material
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