Open AccessFabrication of Si3N4/SiO2 tiered resonant nanopillars with nickel caps arrays: application for optochemical sensing
Author(s) -
Víctor Canalejas-Tejero,
Ana López Hernández,
Rafael Casquel,
Sergio Quintero,
María Fe Laguna Heras,
Miguel Holgado
Publication year - 2018
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.8.001082
Subject(s) - nanopillar , materials science , etching (microfabrication) , reactive ion etching , fabrication , optoelectronics , inductively coupled plasma , nanosphere lithography , silicon , deep reactive ion etching , stack (abstract data type) , nanotechnology , plasma , nanostructure , layer (electronics) , medicine , alternative medicine , pathology , physics , quantum mechanics , computer science , programming language