Open AccessNonlinear optical feedback for nano- and micropatterning of silicon surface under femtosecond laser irradiation
Author(s) -
А. А. Ионин,
S. I. Kudryashov,
А. A. Rudenko,
Л. В. Селезнев,
D. V. Sinitsyn,
Sergey Makarov
Publication year - 2017
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.7.002793
Subject(s) - femtosecond , materials science , nanophotonics , silicon , fabrication , optoelectronics , laser , fluence , black silicon , photovoltaics , nonlinear optics , dielectric , optics , nanolithography , nanotechnology , photovoltaic system , physics , medicine , ecology , alternative medicine , pathology , biology
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