
Annealing of deposited SiO_2 thin films: full-atomistic simulation results
Author(s) -
F. V. Grigoriev,
Екатерина В. Каткова,
А. В. Сулимов,
В. Б. Сулимов,
Alexander V. Tikhonravov
Publication year - 2016
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.6.003960
Subject(s) - materials science , annealing (glass) , thin film , optoelectronics , optics , nanotechnology , composite material , physics