Open AccessOptimization of femtosecond laser processing of silicon via numerical modeling
Author(s) -
L. L. Taylor,
Jun Qiao,
Jie Qiao
Publication year - 2016
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.6.002745
Subject(s) - materials science , femtosecond , laser , silicon , optics , fluence , laser power scaling , fiber laser , laser scanning , ytterbium , laser ablation , optoelectronics , wavelength , physics
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