Open AccessFabrication process of a coaxial plasmonic metamaterial
Author(s) -
Marie Anne van de Haar,
Albert Polman
Publication year - 2016
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.6.000884
Subject(s) - materials science , fabrication , metamaterial , optoelectronics , coaxial , electron beam lithography , plasmon , reactive ion etching , optics , etching (microfabrication) , lithography , substrate (aquarium) , focused ion beam , photolithography , resist , nanotechnology , layer (electronics) , ion , medicine , alternative medicine , physics , pathology , oceanography , quantum mechanics , geology , electrical engineering , engineering