Open AccessMid-infrared ZnSe ridge waveguides fabricated by swift Kr^8+ ion irradiation combined with precise diamond blade dicing
Author(s) -
Yazhou Cheng,
Jinman Lv,
Feng Chen
Publication year - 2015
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.5.002292
Subject(s) - wafer dicing , materials science , irradiation , optics , zinc selenide , diamond , fabrication , infrared , ion , ridge , optoelectronics , wafer , chemistry , composite material , physics , nuclear physics , medicine , paleontology , alternative medicine , organic chemistry , pathology , biology
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