Open AccessEffect of laser-induced conversion of silicon nitride to silicon oxy-nitride on antireflective properties of passivation layer in polysilicon solar cells
Author(s) -
Simonas Indrišiūnas,
Bogdan Voisiat,
A. Rėza,
I. Šimkienė,
Regina Mažeikienė,
A. Selskis,
Gediminas Račiukaitis
Publication year - 2015
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.5.001532
Subject(s) - materials science , silicon nitride , anti reflective coating , passivation , optoelectronics , silicon , layer (electronics) , laser , nitride , optics , nanotechnology , physics