Optically-controlled digital electrodeposition of thin-film metals for fabrication of nano-devices
Author(s) -
Na Liu,
Fanan Wei,
Lianqing Liu,
Hok Sum Sam Lai,
Haibo Yu,
Yuechao Wang,
GwoBin Lee,
Wen J. Li
Publication year - 2015
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.5.000838
Subject(s) - materials science , photolithography , fabrication , nanotechnology , substrate (aquarium) , thin film , semiconductor , optoelectronics , medicine , alternative medicine , pathology , oceanography , geology
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