Open AccessSingle-crystalline Ge_1-x_-ySixSny alloys on Si (100) grown by magnetron sputtering
Author(s) -
Jun Zheng,
Suyuan Wang,
Tianfu Zhou,
Yuhua Zuo,
Buwen Cheng,
Qiming Wang
Publication year - 2015
Publication title -
optical materials express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.5.000287
Subject(s) - materials science , sputter deposition , lattice constant , annealing (glass) , alloy , ternary operation , sputtering , band gap , thermal stability , fabrication , analytical chemistry (journal) , diffraction , optoelectronics , condensed matter physics , thin film , optics , metallurgy , nanotechnology , chemical engineering , physics , medicine , chemistry , alternative medicine , engineering , pathology , chromatography , computer science , programming language