Open AccessObservation of “fast” and “slow” decay processes in oxygen-doped hydrogenated amorphous silicon nitride thin films
Author(s) -
Pei Zhang,
Dameng Tan,
Xiaowei Zhang,
Wei Li,
Pengzhan Zhang,
Kunji Chen
Publication year - 2014
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.5.000022
Subject(s) - materials science , doping , optoelectronics , silicon nitride , thin film , silicon , amorphous solid , amorphous silicon , oxygen , nitride , nanotechnology , chemical engineering , crystalline silicon , crystallography , chemistry , organic chemistry , layer (electronics) , engineering