Open AccessInvestigation and process control of the grating fill-factor and sidewall angle impacts on 2-D metamaterial infrared mirrors
Author(s) -
Haidan Mao,
Xianshan Dong,
Yihui Liu,
Dilusha Silva,
Lorenzo Faraone
Publication year - 2022
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.471630
Subject(s) - grating , materials science , optics , blazed grating , optoelectronics , infrared , diffraction grating , wavelength , etching (microfabrication) , nanotechnology , physics , layer (electronics)