Open AccessMicro-nanostructured plasmonic TiN layer produced using rapid thermal nitridation of a nanoimprinted TiO2 sol-gel
Author(s) -
Nicolas CrespoMonteiro,
Arnaud Valour,
Émilie Gamet,
Maria Usuga Higuita,
Valentin Gâté,
colette turbil,
daniel turover,
Stéphanie Reynaud,
julien joneau,
Yves Jourlin
Publication year - 2022
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.468682
Subject(s) - materials science , tin , titanium nitride , plasmon , nanostructure , layer (electronics) , coating , nanotechnology , thermal stability , titanium , nitride , optoelectronics , metallurgy , chemical engineering , engineering