Open AccessHomogenization and reduction of the roughness of polished sapphire surfaces via inert gas plasma post-processing
Author(s) -
Christoph Gerhard,
Daniel Tasche
Publication year - 2022
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.465969
Subject(s) - materials science , sapphire , surface roughness , surface finish , homogeneity (statistics) , inert gas , plasma , laser , optics , dielectric , homogenization (climate) , plasma processing , analytical chemistry (journal) , optoelectronics , composite material , chemistry , biodiversity , ecology , statistics , physics , mathematics , chromatography , quantum mechanics , biology
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