Open AccessImproving the laser performance of ion beam sputtered dielectric thin films through the suppression of nanoscale defects by employing a xenon sputtering gas
Author(s) -
Paul B. Mirkarimi,
Colin Harthcock,
Siyao Qiu,
Raluca A. Negres,
Gabe Guss,
Thomas Voisin,
Josh Hammons,
Chris Colla,
Harris E. Mason,
Anton Than,
Devika Vipin,
Mengbing Huang
Publication year - 2022
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.462407
Subject(s) - hafnia , materials science , xenon , laser , sputtering , argon , thin film , optoelectronics , optics , atomic physics , nanotechnology , composite material , ceramic , cubic zirconia , physics