Open AccessAtomic layer deposition of conformal anti-reflective coatings on complex 3D printed micro-optical systems
Author(s) -
Simon Ristok,
Philipp Flad,
Harald Gießen
Publication year - 2022
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.454475
Subject(s) - materials science , conformal coating , coating , optoelectronics , optical coating , fabrication , optics , layer (electronics) , etching (microfabrication) , atomic layer deposition , physical vapor deposition , sputtering , reflection (computer programming) , lens (geology) , anti reflective coating , refractive index , thin film , nanotechnology , medicine , alternative medicine , physics , pathology , computer science , programming language
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