Rapid photolithographic fabrication of high density optical interconnects using refractive index contrast polymers | Zendy

Julie I. Frish | Zendy; Tristan S. Kleine | Zendy; Roland Himmelhuber | Zendy; Sasaan A. Showghi | Zendy; Abhinav Nishant | Zendy; KyungJo Kim | Zendy; Linan Jiang | Zendy; Kaitlyn P. Martin | Zendy; Lars Brusberg | Zendy; Stanley Pau | Zendy; Thomas Koch | Zendy; Jeffrey Pyun | Zendy; Robert A. Norwood | Zendy

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Rapid photolithographic fabrication of high density optical interconnects using refractive index contrast polymers

Author(s) -

Julie I. Frish,

Tristan S. Kleine,

Roland Himmelhuber,

Sasaan A. Showghi,

Abhinav Nishant,

KyungJo Kim,

Linan Jiang,

Kaitlyn P. Martin,

Lars Brusberg,

Stanley Pau,

Thomas Koch,

Jeffrey Pyun,

Robert A. Norwood

Publication year - 2022

Publication title -

optical materials express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.925

H-Index - 66

ISSN - 2159-3930

DOI - 10.1364/ome.454195

Subject(s) - materials science , refractive index , refractive index contrast , optoelectronics , fabrication , dry etching , etching (microfabrication) , polymer , lithography , photonics , photolithography , silicon , reactive ion etching , nanoimprint lithography , optics , nanotechnology , composite material , layer (electronics) , medicine , alternative medicine , physics , pathology

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