Open AccessFemtosecond laser-selective polishing of RB-SiC at a fluence between its two-phase threshold
Author(s) -
Huan Chen,
Chaoyang Wei,
Zhen Cao,
Xiaocong Peng,
Zhigang Jiang,
Jianda Shao
Publication year - 2022
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.452849
Subject(s) - polishing , materials science , femtosecond , fluence , surface roughness , optics , laser , silicon carbide , surface finish , optoelectronics , laser ablation , phase (matter) , layer (electronics) , chemical mechanical planarization , composite material , chemistry , physics , organic chemistry