Open AccessEngineering the anisotropy of AlAs wet oxidation using silicon implantation
Author(s) -
S. Calvez,
Alexandre Arnoult,
Guilhem Almuneau
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.441062
Subject(s) - materials science , silicon , fabrication , anisotropy , optoelectronics , oxide , doping , photonics , ion implantation , optics , nanotechnology , ion , quantum mechanics , medicine , alternative medicine , physics , pathology , metallurgy