Open AccessPost-fabrication resonance trimming of Si3N4 photonic circuits via localized thermal annealing of a sputter-deposited SiO2 cladding
Author(s) -
Yanran Xie,
Henry C. Frankis,
Jonathan D. B. Bradley,
Andrew P. Knights
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.426775
Subject(s) - materials science , annealing (glass) , trimming , cladding (metalworking) , sputtering , fabrication , optoelectronics , resonance (particle physics) , sputter deposition , thermal stability , resonator , thin film , nanotechnology , composite material , medicine , alternative medicine , physics , pathology , particle physics , quantum mechanics , computer science , operating system