Open AccessConical phase front and aberration beam shaping for manipulating femtosecond laser chemical etching
Author(s) -
Ehsan Alimohammadian,
Erden Ertorer,
Peter R. Herman
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.426545
Subject(s) - optics , materials science , isotropic etching , femtosecond , etching (microfabrication) , laser , conical surface , surface micromachining , surface finish , beam (structure) , optoelectronics , nanotechnology , fabrication , layer (electronics) , medicine , physics , alternative medicine , pathology , composite material
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