Open AccessOptimization of the deposition parameters of MgF2/LaF3 narrowband reflective FUV multilayers
Author(s) -
Paloma López-Reyes,
Belén Perea-Abarca,
Carlos Honrado-Benítez,
Nuria Gutiérrez-Luna,
Álvaro Ríos-Fernández,
Luis Rodríguez-de Marcos,
Juan I. Larruquert
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.424742
Subject(s) - materials science , deposition (geology) , optical coating , composite material , substrate (aquarium) , coating , stress (linguistics) , thin film , optics , evaporation , x ray reflectivity , surface finish , surface roughness , nanotechnology , paleontology , linguistics , oceanography , philosophy , physics , thermodynamics , sediment , biology , geology
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