Open AccessInfluence of diluted acid mixtures on selective etching of MHz- and kHz-fs-laser inscribed structures in YAG
Author(s) -
Kore Hasse,
Detlef Kip,
Christian Kränkel
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.423931
Subject(s) - materials science , etching (microfabrication) , inscribed figure , laser , optics , isotropic etching , selectivity , optoelectronics , analytical chemistry (journal) , nanotechnology , chemistry , chromatography , biochemistry , geometry , mathematics , physics , layer (electronics) , catalysis