Open AccessSelective etching properties of Mg thin films and micro/nanostructures for dynamic photonics [Invited]
Author(s) -
Thomas G. Farinha,
Tao Gong,
Peifen Lyu,
Ece Deniz,
John Hoerauf,
Marina S. Leite
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.422707
Subject(s) - materials science , photonics , optoelectronics , etching (microfabrication) , biasing , fabrication , modulation (music) , nanotechnology , photonic crystal , plasmon , voltage , electrical engineering , medicine , philosophy , alternative medicine , engineering , layer (electronics) , pathology , aesthetics