Open AccessLow loss ridge-waveguide grating couplers in lithium niobate on insulator
Author(s) -
Sipan Yang,
Yaqian Li,
Jinbin Xu,
Min Wang,
Liying Wu,
Xueling Quan,
Min Liu,
Liucheng Fu,
Xiulan Cheng
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.418423
Subject(s) - lithium niobate , materials science , optics , electron beam lithography , grating , optoelectronics , lithography , waveguide , insulator (electricity) , dry etching , wavelength , thin film , insertion loss , photolithography , photonic integrated circuit , photonics , etching (microfabrication) , resist , nanotechnology , physics , layer (electronics)