Open AccessEffect of pyrolysis on microstructures made of various photoresists by two-photon polymerization: comparative study
Author(s) -
M. I. Sharipova,
T. G. Baluyan,
Ksenia Abrashitova,
Grigory E. Kulagin,
A. K. Petrov,
А. С. Чижов,
Т. Б. Шаталова,
Д. А. Чубич,
Д. А. Колымагин,
Å.G. Vitukhnovsky,
Vladimir O. Bessonov,
Andrey A. Fedyanin
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.416457
Subject(s) - materials science , pyrolysis , polymer , inert gas , annealing (glass) , wafer , nanotechnology , polymerization , silicon , inert , chemical engineering , optoelectronics , composite material , organic chemistry , chemistry , engineering
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