Open AccessFabrication of silicon nanospheres placeable on a desired position for dielectric metamaterials in the visible region
Author(s) -
Taiyu Okatani,
Yosuke Abe,
T. Nakazawa,
Kazuhiro Hane,
Yoshiaki Kanamori
Publication year - 2020
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.415313
Subject(s) - electron beam lithography , materials science , silicon , optics , fabrication , scattering , visible spectrum , light scattering , dielectric , lithography , optoelectronics , nanotechnology , resist , medicine , physics , alternative medicine , layer (electronics) , pathology