Open AccessEpitaxial growth of ε-(AlGa)2O3 films on sapphire substrate by PLD and the fabrication of photodetectors
Author(s) -
Yonghui Gao,
Qian Feng,
Zhaoqing Feng,
Yan Zuo,
Yuncong Cai,
Yachao Zhang,
Jing Ning,
Chunfu Zhang,
Xiaojuan Sun,
Zhitai Jia,
Jincheng Zhang,
Yue Hao
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.413500
Subject(s) - materials science , responsivity , pulsed laser deposition , sapphire , optoelectronics , epitaxy , quantum efficiency , thin film , x ray photoelectron spectroscopy , substrate (aquarium) , band gap , analytical chemistry (journal) , photodetector , optics , laser , layer (electronics) , nanotechnology , chemical engineering , chemistry , engineering , chromatography , oceanography , physics , geology