Open AccessEpitaxial growth of ε-(AlGa)2O3 films on sapphire substrate by PLD and the fabrication of photodetectors
Author(s) -
Yangyang Gao,
Qian Feng,
Zhaoqing Feng,
Yan Zuo,
Yuncong Cai,
Yachao Zhang,
Jing Ning,
Chunfu Zhang,
Xiaojuan Sun,
Zhitai Jia,
Jincheng Zhang,
Yue Hao
Publication year - 2021
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.413500
Subject(s) - materials science , responsivity , sapphire , pulsed laser deposition , optoelectronics , epitaxy , thin film , quantum efficiency , substrate (aquarium) , x ray photoelectron spectroscopy , analytical chemistry (journal) , photodetector , optics , laser , layer (electronics) , nanotechnology , chemical engineering , oceanography , physics , chemistry , engineering , chromatography , geology
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