Open AccessInvestigation into inhomogeneous electrical and optical properties of indium tin oxide film using spectroscopic ellipsometry with multi-layer optical models
Author(s) -
Kun San Tseng,
Yu Lung Lo
Publication year - 2013
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.4.000043
Subject(s) - indium tin oxide , materials science , ellipsometry , optoelectronics , layer (electronics) , indium , refractive index , optics , oxide , tin , thin film , nanotechnology , metallurgy , physics