Open AccessEffect of the hydrogen concentration on the growth mechanism of sputtered hydrogenated silicon thin films
Author(s) -
Hung Ju Lin,
Sheng Hui Chen
Publication year - 2013
Publication title -
optical materials express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.925
H-Index - 66
ISSN - 2159-3930
DOI - 10.1364/ome.3.001215
Subject(s) - elastic recoil detection , materials science , hydrogen , thin film , refractive index , silicon , amorphous silicon , ellipsometry , fourier transform infrared spectroscopy , analytical chemistry (journal) , void (composites) , optics , nanotechnology , crystalline silicon , composite material , optoelectronics , chemistry , organic chemistry , physics