Open AccessHigh-resolution, flexible, and transparent nanopore thin film sensor enabled by cascaded Fabry–Perot effect
Author(s) -
Chao Song,
Xiaoke Ding,
Long Que
Publication year - 2018
Publication title -
optics letters/optics index
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.524
H-Index - 272
eISSN - 1071-2763
pISSN - 0146-9592
DOI - 10.1364/ol.43.003057
Subject(s) - nanopore , materials science , polydimethylsiloxane , layer (electronics) , thin film , optoelectronics , fabry–pérot interferometer , resolution (logic) , optics , nanotechnology , wavelength , physics , artificial intelligence , computer science
This Letter reports a method to significantly improve the optical resolution of the anodic aluminum oxide (AAO) nanopore thin film sensor based on multi-cavity Fabry-Perot interference. The newly designed sensor is fabricated by bonding a layer of transparent polymer thin film (pTF), which is polydimethylsiloxane (PDMS), to a transparent AAO thin film to form a flexible pTF-nanopore sensor. In comparison with the AAO nanopore thin film sensor, the pTF-nanopore sensor shows a much-improved quality (Q) factor and optical resolution. Typical thicknesses of a PDMS layer and an AAO layer of the pTF-nanopore sensor are 80 μm and 2 μm, respectively. The pTF-nanopore sensor used for angle detection shows a sensitivity of 0.4 nm/deg with a resolution of 0.2 deg. The pTF-nanopore sensor can also be used for temperature monitoring with a sensitivity of 0.2 nm/°C and a resolution of 1°C.