High-resolution, flexible, and transparent nanopore thin film sensor enabled by cascaded Fabry–Perot effect | Zendy

Chao Song | Zendy; Xiaoke Ding | Zendy; Long Que | Zendy

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High-resolution, flexible, and transparent nanopore thin film sensor enabled by cascaded Fabry–Perot effect

Author(s) -

Chao Song,

Xiaoke Ding,

Long Que

Publication year - 2018

Publication title -

optics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.524

H-Index - 272

eISSN - 1071-2763

pISSN - 0146-9592

DOI - 10.1364/ol.43.003057

Subject(s) - nanopore , materials science , polydimethylsiloxane , layer (electronics) , thin film , optoelectronics , fabry–pérot interferometer , resolution (logic) , optics , nanotechnology , wavelength , physics , artificial intelligence , computer science

This Letter reports a method to significantly improve the optical resolution of the anodic aluminum oxide (AAO) nanopore thin film sensor based on multi-cavity Fabry-Perot interference. The newly designed sensor is fabricated by bonding a layer of transparent polymer thin film (pTF), which is polydimethylsiloxane (PDMS), to a transparent AAO thin film to form a flexible pTF-nanopore sensor. In comparison with the AAO nanopore thin film sensor, the pTF-nanopore sensor shows a much-improved quality (Q) factor and optical resolution. Typical thicknesses of a PDMS layer and an AAO layer of the pTF-nanopore sensor are 80 μm and 2 μm, respectively. The pTF-nanopore sensor used for angle detection shows a sensitivity of 0.4 nm/deg with a resolution of 0.2 deg. The pTF-nanopore sensor can also be used for temperature monitoring with a sensitivity of 0.2 nm/°C and a resolution of 1°C.

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