Open AccessNanometallic antenna-assisted amorphous silicon waveguide integrated bolometer for mid-infrared
Author(s) -
Yangbo Wu,
Zhipeng Qu,
A. M. Osman,
Wei Chen,
Wei Cao,
Antulio Tarazona,
Swe Zin Oo,
Harold M. H. Chong,
Otto L. Muskens,
Goran Z. Mashanovich,
Milos Nedeljkovic
Publication year - 2021
Publication title -
optics letters/optics index
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.524
H-Index - 272
eISSN - 1071-2763
pISSN - 0146-9592
DOI - 10.1364/ol.412529
Subject(s) - bolometer , materials science , responsivity , analytical chemistry (journal) , physics , optics , optoelectronics , chemistry , detector , photodetector , chromatography
Bolometers are thermal detectors widely applied in the mid-infrared (MIR) wavelength range. In an integrated sensing system on chip, a broadband scalable bolometer absorbing the light over the whole MIR wavelength range could play an important role. In this work, we have developed a waveguide-based bolometer operating in the wavelength range of 3.72-3.88 µm on the amorphous silicon (a-Si) platform. Significant improvements in the bolometer design result in a 20× improved responsivity compared to earlier work on silicon-on-insulator (SOI). The bolometer offers 24.62% change in resistance per milliwatt of input power at 3.8 µm wavelength. The thermal conductance of the bolometer is 3.86×10 -5 W / K , and an improvement as large as 3 orders magnitude may be possible in the future through redesign of the device geometry.