Open AccessWide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source
Author(s) -
Peter Baksh,
Michal Odstrčil,
Hyun-Su Kim,
Stuart A. Boden,
Jeremy G. Frey,
W.S. Brocklesby
Publication year - 2016
Publication title -
optics letters/optics index
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.524
H-Index - 272
eISSN - 1071-2763
pISSN - 0146-9592
DOI - 10.1364/ol.41.001317
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , optics , ptychography , physics , coherent diffraction imaging , high harmonic generation , diffraction , radiation , achromatic lens , optoelectronics , phase retrieval , laser , fourier transform , quantum mechanics
High-harmonic generation (HHG) provides a laboratory-scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to ∼100 μm are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.