Reducing feature size in femtosecond laser ablation of fused silica by exciton-seeded photoionization | Zendy

Boyang Zhou | Zendy; Aravinda Kar | Zendy; M. J. Soileau | Zendy; Xiaoming Yu | Zendy

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Reducing feature size in femtosecond laser ablation of fused silica by exciton-seeded photoionization

Author(s) -

Boyang Zhou,

Aravinda Kar,

M. J. Soileau,

Xiaoming Yu

Publication year - 2020

Publication title -

optics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.524

H-Index - 272

eISSN - 1071-2763

pISSN - 0146-9592

DOI - 10.1364/ol.385011

Subject(s) - femtosecond , materials science , optics , photoionization , laser , ablation , exciton , laser ablation , resolution (logic) , ionization , optoelectronics , physics , ion , engineering , quantum mechanics , artificial intelligence , computer science , aerospace engineering

We demonstrate a method of laser ablation with reduced feature size by using a pair of ultrashort pulses that are partially overlapped in space. By tuning the delay between the two pulses, features within the overlapping area are obtained on the surface of fused silica. The observed dependence of the feature position on delays longer than the free-carrier lifetime indicates an ionization pathway initiated by self-trapped excitons. This method could be used to enhance the resolution of laser-based lithography.

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