Open AccessIndustrial applications of laser micromachining
Author(s) -
Malcolm C. Gower
Publication year - 2000
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.7.000056
Subject(s) - surface micromachining , materials science , microelectromechanical systems , laser drilling , laser beam machining , nozzle , microsystem , fabrication , laser , optics , laser cutting , optoelectronics , laser beams , drilling , mechanical engineering , nanotechnology , metallurgy , engineering , medicine , alternative medicine , physics , pathology
The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.