Open AccessSub-diffraction limited structuring of solid targets with femtosecond laser pulses
Author(s) -
Frank Korte,
Steven Adams,
A. Egbert,
Carsten Fallnich,
Andreas Ostendorf,
Stefan Nolte,
Matthias Will,
J.-P. Ruske,
Boris N. Chichkov,
Andreas Tuennermann
Publication year - 2000
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.7.000041
Subject(s) - femtosecond , materials science , optics , laser , diffraction , femtosecond pulse shaping , dielectric , ultrashort pulse , micrometer , laser ablation , polarization (electrochemistry) , optoelectronics , x ray laser , fabrication , laser power scaling , medicine , chemistry , physics , alternative medicine , pathology
Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100-200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.