Open AccessDelivery of F2-excimer laser light by aluminum hollow fibers
Author(s) -
Yuji Matsuura,
Takashi Yamamoto,
Mitsunobu Miyagi
Publication year - 2000
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.6.000257
Subject(s) - materials science , excimer laser , optics , fiber , fiber laser , optical fiber , all silica fiber , chemical vapor deposition , aluminium , thin film , laser , hard clad silica optical fiber , substrate (aquarium) , excimer , optoelectronics , dispersion shifted fiber , fiber optic sensor , composite material , nanotechnology , physics , oceanography , geology
A hollow fiber composed of a glass-tube substrate and an aluminum thin film coated upon the inside of the tube delivers F2-excimer laser light. A smooth, aluminum thin film was deposited by using metal-organic chemical vapor deposition using dimethylethylamine:alane (DMEAA) as the precursor. It was shown that the transmission loss of the fiber with a 1.0-mm inner diameter was as low as 0.5 dB/m for the fiber with 1.0-mm diameter when the bore of the fiber is pressurized with an inert gas to remove the absorption of air. When the fiber is bent at the radius of 30 cm, the additional loss was 1.6 dB.