Open AccessCryogenic mid-wave infrared hyperspectral Fabry-Perot filter based on a tensile-strained single-layer subwavelength grating mirror
Author(s) -
Haifeng Mao,
Xianshan Dong,
Yihui Liu,
Dilusha Silva,
L. Faraone
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.475649
Subject(s) - optics , materials science , grating , electron beam lithography , fabry–pérot interferometer , optoelectronics , lithography , rigorous coupled wave analysis , diffraction grating , extinction ratio , wavelength , layer (electronics) , resist , physics , composite material
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