Open AccessLarge-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging
Author(s) -
Kui Zhou,
Xiejun Wang,
Xialei Jing,
Fei Wang,
Qian Zhang,
Fei Chen,
Jia Hao,
Chenwei Deng,
Jing Zhou,
Yiting Yu
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.473618
Subject(s) - microelectromechanical systems , materials science , optics , optoelectronics , aperture (computer memory) , fabrication , wafer , surface micromachining , physics , acoustics , medicine , alternative medicine , pathology