Open AccessEffect of sidewall roughness on the diffraction efficiency of EUV high aspect ratio freestanding transmission gratings
Author(s) -
Shan Wu,
Jinshi Wang,
Fengzhou Fang
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.473602
Subject(s) - optics , extreme ultraviolet lithography , materials science , extreme ultraviolet , grating , diffraction , surface finish , wavelength , diffraction efficiency , diffraction grating , surface roughness , rigorous coupled wave analysis , molar absorptivity , physics , composite material , laser