Open AccessSlope error correction on X-ray reflection gratings by a variation of the local line density
Author(s) -
Adam Kubec,
Nazanin Samadi,
Manuel Langer,
Florian Döring,
Benedikt Rösner,
Vitaliy A. Guzenko,
Nazaret Ortiz-Hernandez,
U. Staub,
R. Follath,
Jörg Raabe,
Christian Dávid
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.471438
Subject(s) - optics , grating , electron beam lithography , lithography , synchrotron radiation , x ray optics , materials science , metrology , reflection (computer programming) , wavelength , diffraction grating , physics , resist , x ray , computer science , programming language , layer (electronics) , composite material