Open AccessHigh-sensitive MEMS Fabry-Perot pressure sensor employing an internal-external cavity Vernier effect
Author(s) -
Xiaoshuang Dai,
Shuang Wang,
Junfeng Jiang,
Hongpeng Yang,
Ke Tan,
Zhiyuan Li,
Tiegen Liu
Publication year - 2022
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.469369
Subject(s) - materials science , microelectromechanical systems , silicon , optics , fabry–pérot interferometer , pressure sensor , optoelectronics , diaphragm (acoustics) , optical cavity , pressure measurement , laser , vibration , acoustics , physics , wavelength , thermodynamics , meteorology