Open AccessDesign and manufacture of an all-polymeric integrated multimode interferometer for visible photonics
Author(s) -
Fernando Gordo,
Joana Tátá,
Jérôme Borme,
Morten Andreas Geday,
Manuel CañoGarcía,
Jana B. Nieder
Publication year - 2022
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.469281
Subject(s) - interferometry , materials science , optics , beam splitter , lithography , photonics , electron beam lithography , fabrication , optoelectronics , splitter , photonic integrated circuit , multi mode optical fiber , tolerance analysis , integrated circuit , photolithography , laser , optical fiber , layer (electronics) , resist , nanotechnology , physics , medicine , alternative medicine , engineering , pathology , engineering drawing
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